发明名称 Semiconductor device and method for manufacturing the same
摘要 A semiconductor device is provided which can be manufactured even by using an inexpensive FZ wafer in a wafer process and still has a sharp inclination of a high impurity concentration in a high impurity concentration layer at the outermost portion of the reverse side and at the boundary between the high impurity concentration and a low impurity concentration drift layer, thus achieving both low cost and a high performance. A method for manufacturing a semiconductor device is also provided which can form a high impurity concentration buffer layer and a high impurity concentration layer at the outermost portion of the reverse side without any significant trouble, even after the formation of an active region and an electrode thereof at the right side, to thereby achieve both low cost and high performance.
申请公布号 US6759301(B2) 申请公布日期 2004.07.06
申请号 US20030461094 申请日期 2003.06.13
申请人 FUJI ELECTRIC CO., LTD. 发明人 TAKEI MANABU;FUJIHIRA TATSUHIKO
分类号 H01L21/331;H01L21/336;H01L29/32;H01L29/739;H01L29/861;(IPC1-7):H01L21/336 主分类号 H01L21/331
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