| 摘要 |
PURPOSE: An LCD(Liquid Crystal Display) device and a manufacturing method of the same are provided to form bottom-gate type TFTs(Thin Film Transistors) in a pixel region and top-gate type TFTs in a circuit region, using active layers made of micro-crystalline silicon which has grains larger than grains of amorphous silicon and smaller than grains of poly-crystalline silicon. CONSTITUTION: Pixel portions(100) arranged in a matrix include a plurality of pixel regions(108a) defined by a plurality of gate lines(101) and data lines(103) vertical to each other on a substrate. A plurality of pixel TFTs(107a) of a bottom-gate type include first gate electrodes(102a) formed at intersections between the data lines(101) and the data lines(103) in the pixel portions(100) to control data signals applied to the pixel regions(108a), first gate insulating films(111a) formed on the gate electrodes(102a), and active layers(112) formed on the first gate insulating films(111a) using micro-crystalline silicon. A plurality of circuit TFTs(107b) of a top-gate type are formed on circuit portions(200) at edges of the pixel regions(108a) as switching elements of a driving circuit for driving the pixel TFTs(107a), and include second gate insulating films(111b) on the active layers(112) and second gate electrodes(102b) on the second gate insulating films(111b).
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