| 摘要 |
PURPOSE: A heat generating resistant element film, an ink jet head, a substrate for the ink jet head, and an ink jet apparatus are provided to achieve a record image having a high quality by using the heat generating resistant element film. CONSTITUTION: A heat generating resistant element film is formed in a heat generating resistant element layer(2004). A protective layer is formed on the heat generating resistant element film. The protective layer includes an Si-containing insulation layer. An electrode layer(2005) is laminated on the heat generating resistant element layer(2004). The heat generating resistant element film consists of Cr, Si and N, wherein Cr is about 15 to 20 percent, Si is about 40 to 60 percent, and N is about 20 to 40 percent. The heat generating resistant element film has a thickness of about 200 to 1000 angst.
|
