发明名称 |
SLURRY FOR CMP OF TUNGSTEN AND FORMING METHOD TUNGSTEN PLUG OF SEMICONDUCTOR DEVICE USING THE SAME |
摘要 |
PURPOSE: A slurry for CMP of tungsten and a method for forming a tungsten plug of a semiconductor device using the same are provided to prevent plug recess and erosion by using slurry including ionization oxidant such as HMnO4 and H2CrO4. CONSTITUTION: An interlayer dielectric(22) is formed on a substrate(21). A contact hole is formed by selectively etching the interlayer dielectric. A metal barrier layer(24) and a tungsten film are sequentially formed in the contact hole. A tungsten plug(25a) is formed by polishing the tungsten film and the metal barrier layer using slurry including ionization oxidant of HMnO4 or H2CrO4 of 0.1-5 weight percent.
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申请公布号 |
KR20040060408(A) |
申请公布日期 |
2004.07.06 |
申请号 |
KR20020087198 |
申请日期 |
2002.12.30 |
申请人 |
HYNIX SEMICONDUCTOR INC. |
发明人 |
HAN, MUN SU |
分类号 |
H01L21/28;(IPC1-7):H01L21/28 |
主分类号 |
H01L21/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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