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发明名称
SUSCEPTOR, GASEOUS PHASE GROWING DEVICE, DEVICE AND METHOD FOR MANUFACTURING EPITAXIAL WAFER, AND EPITAXIAL WAFER
摘要
申请公布号
KR20040061007(A)
申请公布日期
2004.07.06
申请号
KR20047008204
申请日期
2002.11.27
申请人
发明人
分类号
H01L21/205;C23C16/44;C23C16/458;C30B25/12;H01L21/68
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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