| 摘要 |
PURPOSE: A transporting apparatus, a movable probe card transporting apparatus, a probe apparatus, and a method for transporting the probe card into the probe apparatus are provided to maintain large probe cards in parallel with one another in the probe apparatus. CONSTITUTION: A transporting mechanism includes a base(13), a first arm(15), a second arm(16), a pair of rotary bodies(17A,17B), an endless belt(17C), and first and second connection members(18A,18B). The first arm is arranged on the base to be movable forward/backward. The second arm is arranged on the first arm mechanism to be movable forward/backward. The rotary bodies are arranged at front and rear portions, respectively, of the first arm mechanism. The endless belt is wound between the rotary bodies. The first connection member connects the endless belt to the base, and the second connection member connects the endless belt to the second arm. The first and second arms move forward/backward on the base when the endless belt is moved around the rotary bodies.
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