WAFER CASSETTE

摘要

PURPOSE: A wafer cassette is provided to reduce a period for inserting a fixing member and prevent the ejection of the fixing member in a rotating process by forming a fixing member and the wafer cassette with one body. CONSTITUTION: A wafer cassette(22) includes a wafer loading part and a fixing member adhesion part. The wafer loading part is used for loading a wafer. A fixing member is adhered to the fixing member adhesion part. The fixing member is close to an external support guide(11). The fixing member and the wafer cassette are formed with one body. The fixing member is formed with a bar shape of Teflon.