VARIABLE OPTICAL ATTENUATOR OF MEMS

摘要

PURPOSE: A variable optical attenuator of a MEMS(Micro Electro Mechanical System) is provided to reduce generation of scattered light by forming a surface layer on an upper surface of an optical shielding layer. CONSTITUTION: A variable optical attenuator of a MEMS includes a substrate, a micro-electro actuator, a transmitting terminal, a receiving terminal, and an optical shielding layer. The substrate is formed with a flat surface. The transmitting terminal and the receiving terminal(20,30) are arranged on the flat surface of the substrate. The micro-electro actuator is arranged on the substrate. The optical shielding layer(47) is moved to a predetermined position by the micro-electro actuator. A surface layer is formed on an upper surface of the optical shielding layer. The surface layer has a reflectance ratio below 80 percent.