| 摘要 |
PURPOSE: An LCD(Liquid Crystal Display) and a manufacturing method thereof are provided to form firstly source/drain electrodes, thereafter form an ohmic contact layer, an active layer, a gate insulation film and a gate electrode through a mask by once and then form a pixel electrode through the third mask process, thereby enhancing the productivity. CONSTITUTION: The first metal layer(125) is formed on a substrate(120). An amorphous silicon is deposited on the first metal layer(125). Thereafter, a photoresist is coated on the amorphous silicon and then patterned. Thereafter, source and drain electrodes(121a,121b), a lower electrode(123) and a data pad(125) are formed by using the photoresist pattern mask. Thereafter, an amorphous silicon and an insulation film are sequentially deposited on the substrate, The second metal layer is deposited on the insulation film. Thereafter, after coating and patterning a photoresist, an active layer(137), a gate insulation film(139), a gate electrode(141) and an ohmic contact layer(133) interposed between the active layer(137) and the source/drain electrodes(121a,121b) are formed by the photoresist pattern mask. An upper electrode(143) is formed at an upper portion of the lower electrode(123) by the above method and a gate pad is formed together. Thereafter, the third metal layer is formed on the entire surface of the substrate and then a pixel electrode is formed by a photoresist pattern mask.
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