发明名称 WAFER LOAD CHECK SENSOR
摘要 PURPOSE: A wafer load check sensor is provided to prevent breakage of a wafer by easily and exactly checking the loading and unloading state. CONSTITUTION: A sensor(210) is located on a wafer transfer chuck(200). At this time, the sensor has a desired offset angle from the perpendicular direction of a wafer. A reflection mirror(110) on a quartz lifter(100) is located to align the sensor. That is, the reflection mirror also has the offset angle same to the sensor. Preferably, the offset angle is about 9 degree.
申请公布号 KR20040059476(A) 申请公布日期 2004.07.05
申请号 KR20020086224 申请日期 2002.12.30
申请人 DONGBU ELECTRONICS CO., LTD. 发明人 CHO, IN BAE
分类号 H01L21/304;(IPC1-7):H01L21/304 主分类号 H01L21/304
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