发明名称 IMMERSION CIRCULATOR
摘要 PURPOSE: An immersion circulator is provided to maintain constant temperature of a developer by using an additional return tube. CONSTITUTION: An FTC(Fluid Temperature Controller)(10) circulates a constant temperature water by driving a pump. A water jacket(40) includes a circulation tube(40a) to maintain constant temperature of a developer. An eclipse nozzle(50) sprays the temperature-controlled developer. A return tube(60) is connected between the eclipse nozzle and an inlet tube(30) of the water jacket for easily circulating the constant temperature water.
申请公布号 KR20040059471(A) 申请公布日期 2004.07.05
申请号 KR20020086219 申请日期 2002.12.30
申请人 DONGBU ELECTRONICS CO., LTD. 发明人 CHOI, GI DEOK;KWON, SUN HO
分类号 H01L21/02;(IPC1-7):H01L21/02 主分类号 H01L21/02
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