| 摘要 |
PURPOSE: A driving motor controller of a loadlock chamber is provided to prevent particles and to restrain damage of a wafer due to a sudden stop of a pivot by decelerating gradually the pivot. CONSTITUTION: The first and second sensor part(100,105) detect a pivot at predetermined positions and generate sensing signals. The first and second time delay part(110,115) as photo couplers generate DC(Direct Current) voltages by using the sensing signals. The first and second relay(120,125) decrease gradually the DC voltages using variable resistors, wherein each relay includes two variable condensers and one variable resistor. A driving motor(130) decelerates the pivot according to the gradually decreased DC voltages.
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