METHOD FOR FORMING MINUTE STRUCTURE AND DEVICE USED FOR THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a method for forming and stabilizing a minute structure of a selectable material in an intended position of a selectably processed surface, and also provide a device used for the same. SOLUTION: A means for forming the minute structure comprises mounting a material 3 for forming a meniscus on a processed surface of a substrate for forming the minute structure; installing a sharpened probe 4 opposed to the material 3 for forming the meniscus; installing an electromagnetic field applying means 8 to induce mutual electromagnetic operation between the processed surface and material 3 for forming the meniscus and the sharpened probe; and installing a curing means to cure the meniscus formed between the processed surface and the sharpened probe, in the device for forming a minute object by inducing a liquid meniscus of the selectable material on the processed surface. COPYRIGHT: (C)2004,JPO&NCIPI