HIGH PURITY ALUMINUM NITRIDE POWDER AND METHOD OF MANUFACTURING THE SAME, AND HIGH PURITY ALUMINUM NITRIDE SINTERED COMPACT

摘要

PROBLEM TO BE SOLVED: To provide aluminum nitride powder exhibiting excellent heat conductivity.

SOLUTION: The high purity aluminum nitride powder contains ≤50 wt.ppm each of Si and an alkaline earth metal, ≤15 wt.ppm each of Fe, Ti, K, Na and a rare earth element, ≤1.5 wt.% oxygen and ≤0.15 wt.% carbon.

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