发明名称 |
DROPLET LETTING OUT APPARATUS, DROPLET LETTING OUT METHOD AND ELECTRO-OPTICAL DEVICE |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a droplet letting out apparatus and a droplet letting out method capable of reliably letting out droplets. <P>SOLUTION: A droplet letting out head 100 has a nozzle 140 which lets out a solution stored in a solution tank 110. A piezoelectric element 130 increases or reduces the pressure of the solution stored in a pressure chamber 120 and lets out or sucks a liquid column from the nozzle 140. A laser 200 and a cylinder lens 210 disposed near the nozzle 140 condense laser beams on the liquid column and facilitate the formation of droplets from the liquid column by means of the piezoelectric element 130. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
申请公布号 |
JP2004181448(A) |
申请公布日期 |
2004.07.02 |
申请号 |
JP20030299317 |
申请日期 |
2003.08.22 |
申请人 |
SEIKO EPSON CORP |
发明人 |
MIURA HIROTSUNA |
分类号 |
G02F1/1335;B05C5/00;B05C9/12;B05D3/06;B05D7/00;B41J2/14;H01L51/50;H05B33/10;H05K3/00 |
主分类号 |
G02F1/1335 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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