发明名称 DROPLET LETTING OUT APPARATUS, DROPLET LETTING OUT METHOD AND ELECTRO-OPTICAL DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a droplet letting out apparatus and a droplet letting out method capable of reliably letting out droplets. <P>SOLUTION: A droplet letting out head 100 has a nozzle 140 which lets out a solution stored in a solution tank 110. A piezoelectric element 130 increases or reduces the pressure of the solution stored in a pressure chamber 120 and lets out or sucks a liquid column from the nozzle 140. A laser 200 and a cylinder lens 210 disposed near the nozzle 140 condense laser beams on the liquid column and facilitate the formation of droplets from the liquid column by means of the piezoelectric element 130. <P>COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004181448(A) 申请公布日期 2004.07.02
申请号 JP20030299317 申请日期 2003.08.22
申请人 SEIKO EPSON CORP 发明人 MIURA HIROTSUNA
分类号 G02F1/1335;B05C5/00;B05C9/12;B05D3/06;B05D7/00;B41J2/14;H01L51/50;H05B33/10;H05K3/00 主分类号 G02F1/1335
代理机构 代理人
主权项
地址