| 摘要 |
PROBLEM TO BE SOLVED: To provide a control method of the chuck temperature, capable of reducing the consumption power of the entire temperature control system in an arbitrary low temperature region. SOLUTION: A first temperature control system 20 outputs a heater power command value for an electric heater 3 based on the chuck temperature set value and the chuck temperature measurement value. A second temperature control system 30 controls the temperature and the supply amount of a cooling liquid based on the chuck temperature set value and an over-cooling temperature set value. There are provided a measuring means 41 that measures the average value of consumed power with the electric heater, and a calculation means 42 that calculates an over-cooling temperature correction value based on the average value of the consumed power which is measured and the heater power set value, with the second temperature control system instructed to correct the over-cooling temperature set value based on the over-cooling temperature correction value. COPYRIGHT: (C)2004,JPO&NCIPI |
