| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor which can be miniaturized structurally, and high in detecting accuracy by improving a diaphragm acting as a liquid pressure sensing part, and to provide a method of manufacturing the pressure sensor. SOLUTION: In the method of manufacturing the capacitance-type diaphragm pressure sensor for detecting liquid pressure, non-metallic diaphragms formed in a paper strip shape are arranged at opposite side, and vapor deposition electrodes are respectively formed on the opposite sides of the diaphragms, thereby forming up a pressure-receiving part (10a) in a pressure detecting member (10). In the pressure-detecting member, a metallic material is deposited on a region around the diaphragm, except an edge section where an electrode output terminal is formed; a fusible flange is mounted near the boundary between the pressure-receiving part and the edge section of the pressure-detecting member; a nickel plate (22) is formed as a protective layer around the flange and the pressure-receiving part of the pressure detecting member; then the flange is removed, leaving the nickel-plated protective layer; and retaining members (31, 32) for attachment are attached to a region where the flange is removed. COPYRIGHT: (C)2004,JPO&NCIPI
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