| 摘要 |
PURPOSE: A method for manufacturing an array substrate for an LCD(Liquid Crystal Display) is provided to perform a gate wire formation process and simultaneously an aluminum nitride film formation process with aluminum, thereby increasing yield and reducing the cost due to the process time reduction. CONSTITUTION: A switching region(T) and a pixel region(P) are defined on a substrate(100). The first metal layer is formed at the entire region of the substrate(100). The first gate insulation film is formed on the first metal layer. A gate electrode(108) and a gate wire(110) are formed by patterning the first metal layer and the first gate insulation film. The second insulation film(114) is formed at the entire surface of the substrate. An active layer(116) and an ohmic contact layer(118) are formed on the gate insulation film(114). A source electrode(120), a drain electrode(122) and a data wire(124) extended from the source electrode(120) are formed by depositing and patterning a conductive metal on the substrate(100) formed on the ohmic contact layer(118). A metal layer(126) with an island shape is formed at an upper portion of the gate wire(112). A pixel electrode(134) positioned at the pixel region(P) and contacted with the metal layers(122,126) is formed by depositing and patterning a conductive metal on the entire surface of the substrate(100) formed on a passivation film.
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