| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sealing member having a good durability which is used in a plasma processing apparatus. <P>SOLUTION: The sealing member 27 comprises an annular main body 28 formed of fluorine resin, and a protection ring 29 which is attached to an inside portion of the main body 28 and is formed of a plasma resistant material. The main body 28 has a nearly U-shaped cross-sectional shape composed of an inside wall 30 and side walls 31a and 31b, thus forming an annular concave section 32 opened to the outside. Inside the annular concave section 32 of the main body 28, a blade spring ring 34 having a nearly U-shaped cross-sectional shape is located to expand both side walls 31a and 31b. The protection ring 29 has a nearly U-shaped cross-sectional shape composed of a bottom wall 36 and side walls 37a and 37b, and is so structured as to cover the entire inside portion and inside corner portions of the main body 28. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
