| 摘要 |
PROBLEM TO BE SOLVED: To provide a micromachine for a high frequency filter having a high Q value, and a higher frequency band. SOLUTION: This micromachine 1 has an output electrode 7 arranged on a base board 5, an interlayer insulating film 9 arranged in a state of covering the base board 5 and having a hole pattern 9a with the output electrode 7 as a bottom part and a belt-like vibrator electrode 11 arranged on the interlayer insulating film 9 so as to cross an upper part with the inside of the hole pattern 9a as a space part A. The vibrator electrode 11 is characterized by being arranged in a recessed shape on the hole pattern 9a side along a side wall of the hole pattern 9a. COPYRIGHT: (C)2004,JPO&NCIPI
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