| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for washing an object which can prevent the object from being broken. SOLUTION: This apparatus 1 has a washing tank 10 for housing a mask to be washed, an ultrasonic vibration generating part 11, and a pair of shield plates. The washing tank 10 is formed in the shape of a box, houses the mask, and has a tank body 15 filled with a washing liquid. The tank body 15 is composed of a bottom wall 17 and a plurality of peripheral walls 18, 18a, and 18b. The ultrasonic vibration generating part 11 has a plurality of piezoelectric resonators 21 fitted to the peripheral wall 18a of the tank body 15. The piezoelectric resonators 21 vibrate along an arrow S. One shield plate is arranged between the peripheral wall 18a and the mask, and the other shield plate is arranged between the peripheral wall 18b and the mask. The shield plates allow the transmission of the ultrasonic vibration of a washing liquid to a place to be washed of the mask and regulate the transmission to a place not to be washed of the mask. COPYRIGHT: (C)2004,JPO&NCIPI
|
