| 摘要 |
PURPOSE: A substrate conveying apparatus of an LCD(Liquid Crystal Display) is provided to minimize a vibration due to static electricity when separating a substrate from a substrate support in order to transfer the substrate, thereby preventing the break of the substrate. CONSTITUTION: The substrate conveying apparatus comprises a hook(410) in which its angle is controlled. Since the more the substrate's(420) size become large, the more the substrate's(420) bend become large, the angle of the hook(410) become large. If the hook(410) is inclined to the horizontal surface, when the substrate(420) is loaded, the contact area of the substrate(420) and the hook(410) is increased, so that the substrate(420) is conveyed safely. Also, the contact area of the substrate(420) and a vacuum pad is increased, so that the leakage of vacuum pressure is minimized.
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