PIEZOELECTRIC THIN-FILM ELEMENT, INK JET RECORDING APPARATUS, AND MANUFACTURE THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric thin-film element which is capable of also dealing with high-speed ON/OFF driving and attains the prevention of leak current increase or improvement of reliability.

SOLUTION: A Pb containing perovskite piezoelectric material and a Pb non-containing piezoelectric material are laminated to lower a dielectric constant. Thus, high-speed driving is made possible and excessive Pb diffusion onto a surface is prevented, such that reliability is improved.

COPYRIGHT: (C)2004,JPO&NCIPI