| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a reliable laminated piezoelectric actuator element which can avoid damage of its function and can reliably and conveniently maintain electric connection with an internal electrode layer, even when an external electrode was broken. <P>SOLUTION: The actuator element includes a laminate 1 made up of a piezoelectric ceramic layer 2 and an internal electrode layer 3. The internal electrode layer 3 exposed to the side surface of the laminate 1 is covered with a first insulating layer 4 for every other layer. The first insulating layer 4 is covered with an external electrode 5 electrically connected with the internal electrode layer 3 for every other layer. An external lead 7 for keeping the electric connection with a drive circuit is provided on the external electrode 5 to be connected therewith. A metallic powder layer 8 is formed so as to cover the connection part of the external lead 7 and the entire external electrode 5. Side surfaces of the laminate other than in a displacement direction but including the metallic powder layer 8 are covered with a second insulating layer 6. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
