| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for easily manufacturing a cathode substrate for FED. <P>SOLUTION: In this manufacture method for a cathode substrate for FED having at least a cathode electrode layer 22, an insulating layer 24, a gate electrode layer 25 and a carbon-based emitter growth catalyst layer 23, the carbon-based emitter growth catalyst layer is formed before the insulating layer 24 and the gate electrode layer 25 are formed. The film thickness of the catalyst layer 23 is 1 nm to 50 nm, and the catalyst layer is made of Fe, Co or an alloy including at least one kind of these metals. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
