| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a bubble removing device for viscous fluid which can reliably remove bubbles in a resist agent, etc. and can perform a quick bubble removing work. <P>SOLUTION: The bubble removing device for viscous fluid is used in a cycling resist agent supply mechanism, etc. in a resist agent applicator, and has a viscous fluid storage vessel, a supply port for a viscous fluid formed above the viscous fluid storage vessel, and a cylinder having a ceiling fitted in the viscous fluid storage vessel. The cylinder is formed in a tapered shape which enlarges its diameter toward downward, and then the viscous fluid is released from the supply port. While the viscous fluid flows down on an outer wall of the cylinder, bubbles included in the viscous fluid are removed. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
