| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pump capable of improving motor efficiency by reducing heat generation of a motor rotor and improving cooling efficiency of the motor rotor. SOLUTION: The vacuum pump performs exhaustion by synchronously rotating a pair of faced multi-stage pump rotors. The motor rotors 5A and 5B having permanent magnets 5a and 5b on their circumferences are mounted to spindle ends 2a and 2b on the suction side of the multi-stage pump rotors, motor stators 6 are arranged around them, the multi-stage pump rotors are driven by a direct current motor, and timing gears 11 of the pair of pump rotors 2 are mounted to the spindle end on the opposite side to the motor rotors. COPYRIGHT: (C)2004,JPO&NCIPI
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