PELLICLE MANUFACTURING METHOD BY SELECTIVE HEATING WITH HOT PLATE AND PELLICLE MANUFACTURING DEVICE HAVING EXCELLENT PRODUCTIVITY

摘要

PURPOSE: Provided are a method for manufacturing a pellicle provided with tensile stress and a pellicle manufacturing device, which show excellent productivity and permit a wide range of selection to the materials for pellicle plates and pellicle frames in manufacturing pellicle. CONSTITUTION: The pellicle manufacturing method comprises: a step of heating a portion positioned inside of the part where a pellicle plate(1) is adhered to a pellicle frame(3), when the pellicle plate(1) is bonded to the pellicle frame(3). The pellicle manufacturing device for bonding a pellicle plate(1) to a pellicle frame(3) is euqipped with a hot plate(4) positioned inside of the part where the pellicle plate(1) is adhered to the pellicle frame(3), while facing thereto.