| 摘要 |
PROBLEM TO BE SOLVED: To provide a nozzle which can prevent the dripping of a liquid from a discharge port. SOLUTION: The nozzle 10 comprises discharge ports 20a, 20b arranged so as to face forward, a connecting hole 22 which communicates with a treatment liquid supply tube 14 arranged above, liquid reservoir passages 24a, 24b which are arranged below the discharge ports to communicate with the connecting hole, connecting passages 26a, 26b which have a diameter smaller than the inner diameter of the liquid reservoir passages and extend upward from the liquid reservoir passages, and discharge passages 28a, 28b which extend horizontally from the top ends of the connecting passages to communicate with the discharge ports. COPYRIGHT: (C)2004,JPO&NCIPI
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