PROCESSOR FOR FLAT-PLATE-FORM PROCESSED OBJECT, AND PROCESSING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To realize concretely by a simple structure such a substrate holding method as to divide a plurality of chuck pins into their two sets and as to separate alternately the two classes of shuck pins from the outer peripheral edge of the substrate. SOLUTION: A processor for flat-plate-form processed objects has a chuck opening/closing shaft 13 capable of moving up down, a plurality of chuck hands 20a-20f provided radially in a horizontal direction, chuck pins 21a-21f provided respectively at the ends of the chuck hands 20a-20f and having respectively in their upper end portions substrate contacting portions 22a-22f, and a chuck opening/closing plate 25 for so converting the up/down operations of the chuck opening/closing shaft 13 into the two kinds of opening/closing operations of the chuck hands 20a-20f as to transfer the two kinds of opening/closing operations to the respective sets of chuck hands 20a-20f divided into the two sets. Further, in order that the chuck opening/closing plate 25 realizes the two kinds of opening/closing operations, it has in its upside/downside directions two kinds of slots 27a-27f whose curved states are different from each other. COPYRIGHT: (C)2004,JPO&NCIPI