Optical characterization method for chemical analysis of materials, involves determining error using initial wavelength, initial refractive index, and interpolation law until desired precision is obtained on spectrum

摘要

The method involves selecting initial wavelengths, an interpolation law for refractive index of material, and an initial index for each initial wavelength. A theoretical spectrum and the error between measured spectrum and theoretical spectrum are determined using initial wavelength, initial refractive index, and the interpolation law. Selecting and determining steps are repeated for other initial wavelengths until obtaining desired precision on each obtained spectrum. The theoretical spectrum is determined according to selected reflectometry and ellipsometry calculation methods, and refractive index deducted by interpolation of index value in the initial wavelength. The error is determined between measured spectrum and theoretical spectrum, by varying the position of unknown indices values and/or depth of layer and/or values of refraction index to the initial value and then the spectrum is obtained.