SPUTTERING TARGET FOR FORMING PROTECTIVE FILM OF OPTICAL RECORDING MEDIUM WHICH ENABLES HIGH-SPEED SPUTTERING

摘要

PROBLEM TO BE SOLVED: To provide a sputtering target for forming a protective film of an optical recording medium, which is made of a zinc sulfide-silicon dioxide sintered compact and can perform high-speed sputtering, and its manufacturing method.

SOLUTION: The sputtering target for forming the protective film of the optical recording medium is the sintered compact which has a composition comprising 10-30 atomic% silicon dioxide, 0.01-10 atomic% argon, nitrogen or a mixture thereof and the balance being zinc sulfide.

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