| 摘要 |
PURPOSE: A micro mirror and a fabricating method thereof are provided to drive effectively the micro mirror under a low voltage by forming the thickness of a mirror plate and a twist beam thinner than the thickness of a comb finger. CONSTITUTION: A micro mirror has a vertical comb-drive structure to insert comb fingers(14,15) of a mobile comb between comb fingers of a fixing comb when the mobile comb having a mirror plate(11) is moved vertically. The mobile comb includes one or more twist axis as a rotating axis of the mirror plate when the mobile comb having the mirror plate is moved vertically. The mirror plate of the mobile comb, a twist beam(13) of the twist axis, and the comb fingers of the mobile comb have different thickness, respectively. Each thickness of the mirror plate and the twist beam is thinner than the thickness of the comb fingers of the mobile comb.
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