METHOD OF MANUFACTURING CRYSTALLINE THIN FILM

摘要

PROBLEM TO BE SOLVED: To solve a problem that it is difficult to correctly control a position of a crystal grain in a manufacturing method of the crystal thin film by conventional melting/re-solidification. SOLUTION: In the manufacturing method of the crystal thin film, the thin film where regions different in states continuously coexist is melted and re-solidified by a plurality of heating means. COPYRIGHT: (C)2004,JPO&NCIPI