| 摘要 |
PROBLEM TO BE SOLVED: To provide a flaw inspection device capable of inspecting a flaw with high reliability by simple constitution, and an flaw inspection method using the same. SOLUTION: The flaw inspection device is equipped with an optical system 13 for illuminating a substrate 11, an image forming optical system 14 for forming the diffracted image of the substrate, optical members 25 and 26 which are arranged on the optical axis O3 of the image forming optical system on the substrate side of the pupil position (27) of the image forming optical system and rotatable centering around at least one axis vertical to the optical axis O3, an image pickup means 28 for picking up the diffracted image to output an image signal, fine adjustment means 16-19 for finely adjusting the rotary state (the angle of rotation to the optical axis O3) of the optical member on the basis of the image signal and a detection means 18 for detecting the flaw of the substrate on the basis of the image signal outputted from the image pickup means after the rotary state of the optical member is finely adjusted. COPYRIGHT: (C)2004,JPO&NCIPI
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