| 摘要 |
PROBLEM TO BE SOLVED: To measure the position of an alignment mark accurately even if any vibration occurs, and to compensate a displacement between an exposing mask and an exposing body correctly. SOLUTION: The exposure device includes: an image pick-up means 7 for detecting optically alignment marks arranged each at an exposure mask 4 and an exposing body 2; alignment means 3, 5, 6 for aligning the exposing mask 4 and the exposing body 2 based on the detected result of the image pick-up means 7; and a light source for casting an illuminating light beam 8 for detecting the alignment mark by the image pick-up means 7. The irradiation of light beam is so arranged that the alignment mark is irradiated instantaneously with the illuminating light beam. COPYRIGHT: (C)2004,JPO&NCIPI
|
