| 摘要 |
PROBLEM TO BE SOLVED: To provide a clean bench device with washing pass box capable of selectively switching a clean bench operation mode between a positive pressure, normal pressure, and negative pressure operation modes by easily and securely carrying materials to be washed in a working space in a clean bench by maintaining the materials to be washed in a sterilized state after washing the materials to be washed. SOLUTION: In this clean bench device 1 with the washing pass box, the washing pass box 2 having a washing space 11 storing the materials to be washed and a washing device for washing the materials to be washed by air or washing fluid is installed adjacent to, parallel with, and integrally with the clean bench 3. A carrying-in opening 57 is formed in a partition wall 38 partitioning between the washing pass box 2 and the clean bench 3. An open/close door is installed to open/close the carrying-in opening 57 so that, with the open/close door opened and the carrying-in opening 57 opened, the washed materials in the washing space 11 can be carried from the carrying-in opening 57 into the working space 31 in the clean bench 3. COPYRIGHT: (C)2004,JPO&NCIPI
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