| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a multi-beam multi-head plotting device capable of easily performing image coupling between plotting heads highly precisely, and shortening a plotting period of time. <P>SOLUTION: In the multi-beam multi-head plotting device equipped with a plurality of plotting heads 41 and 42 having optical systems 5-9 and a polarizer 10 in which laser beams 2 are incident from a laser beam source and the incident laser beams are guided to a plotting area, two acousto-optical elements 12 to adjust the optical axis of the laser beams in the two-dimensional direction are provided on each plotting head. A plurality of beam splitters 3 are preferably provided to guide the laser beams 2 from the laser beam source to the plurality of plotting heads. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
