| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a valve which is suitable for applications of semiconductors, opened/closed to feed process gas at high speed, and has high durability and long service life. <P>SOLUTION: In this solenoid valve, opening/closing action to a fluid passage is conducted by driving a plunger 6 by magnetic force of a solenoid 5. It includes a valve head 7 that is movable attached to one end of the plunger 6, a valve seat 12 including an orifice 8 to which the valve head 7 is applied to form a valve, and a spring 9 to press the valve head 7 to the orifice 8. Either one of the valve head 7 and the orifice 8 is formed of metal material. The other is formed of non-metal material that is harder than the above metal material. The metal material is high-Ni alloy having high corrosion resistance, and the non-metal material is ceramic-based non-metal material, preferably. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
