| 摘要 |
PROBLEM TO BE SOLVED: To supply a matrix structure of carbon nanotubes bent in a fixed direction. SOLUTION: This invention provides the carbon nanotube matrix structure including a substrate, catalyst alloy particles formed on the substrate, and a matrix of the carbon nanotubes grown on the catalyst alloy particles and bent in a fixed direction for diversified design of elements using the carbon nanotubes. The invention also provides a manufacturing method of said structure including the following steps: (1) to deposit a catalyst layer on the substrate, (2) to deposit a material layer on the catalyst layer for controlling the carbon nanotube growth rate, (3) to anneal them in the atmosphere containing oxygen to oxidize the catalyst layer to nano-order particles, and (4) to input hydrocarbon gas to grow the carbon nanotubes. COPYRIGHT: (C)2004,JPO&NCIPI |
