MICRO DEVICE AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To realize a high signal transmission characteristic regarding a micro device which is suitably used for an optical switch and a method of manufacturing the micro device. SOLUTION: A moving part 24 furnished with a mirror 26 and a base plate part 23 which movably supports the moving part 24 are provided. Further, an optical fiber 27 is so arranged that the angleαbetween incident light to the mirror 26 and the reflected light from the mirror 26 becomes an acute angle (α<90°). COPYRIGHT: (C)2004,JPO&NCIPI