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发明名称
晶片尺度标记器以及校准标记位置的方法
摘要
一种晶片尺度标记器(chipscalemarker),其中包括:一雷射系统;一个用以支撑所要处理之晶圆之晶圆保持器(waferholder);以及一个藉由连接至一X-Y移动平台(X-Ystage)而在上述晶圆保持器上方移动且用以监控上述晶圆保持器之中心孔所支撑之晶圆之照相机。上述晶片尺度标记器更包括:一个可分离地排列在上述雷射系统之雷射光束光径上且用以降低雷射光束之功率密度之单元;以及一个排列在上述晶圆保持器之中心孔上且用以指示上述雷射系统之雷射光束照射位置之萤幕。
申请公布号
TW200411895
申请公布日期
2004.07.01
申请号
TW092118436
申请日期
2003.07.07
申请人
EO科技股份有限公司
发明人
韩裕熙;全昌洙
分类号
H01L23/544
主分类号
H01L23/544
代理机构
代理人
詹铭文;萧锡清
主权项
地址
韩国
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