发明名称 SYSTEM AND A METHOD OF MEASURING AN OPTICAL PATH DIFFERENCE IN A SENSING INTERFEROMETER
摘要 An apparatus and a method of measuring an optical path difference in a sensing interferometer. Light from a source is directed in the sensing interferometer. The light reflected from the sensing interferometer is splitted into first and second beams respectively directed into two reference interferometers having optical path differences greater than the coherence length of the source and such that the optical signals are in quadrature. The intensities of the light transmitted by the reference interferometers and recombined light reflected from the reference interferometers are detected for measuring the optical path difference in the sensing interferometer. Additional light sources allow for correction of internal perturbations and absolute measurement of the optical path difference in the sensing interferometer.
申请公布号 WO2004036164(A3) 申请公布日期 2004.07.01
申请号 WO2003CA01547 申请日期 2003.10.07
申请人 FISO TECHNOLOGIES INC. 发明人 VAN NESTE, RICHARD;BELLEVILLE, CLAUDE;PRONOVOST, DANIEL;PROULX, ALAIN
分类号 G01B9/02 主分类号 G01B9/02
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