发明名称 |
Process for coating a substrate used in the production of dielectrics or ferroelectrics in the manufacture of memory chips in microelectronics comprises applying a suspension onto a substrate, vaporizing the substrate, and sintering |
摘要 |
Process for coating a substrate comprises: applying a finely divided suspension having crystalline oxide particles onto a substrate; vaporizing the substrate; and sintering the coating on the substrate.
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申请公布号 |
DE10260091(A1) |
申请公布日期 |
2004.07.01 |
申请号 |
DE2002160091 |
申请日期 |
2002.12.19 |
申请人 |
BASF AG |
发明人 |
STERZEL, HANS-JOSEF |
分类号 |
H01L21/316;H01L21/8239;(IPC1-7):H01L21/316;H01L21/823 |
主分类号 |
H01L21/316 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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