发明名称 Super-junction semiconductor device and method of manufacturing the same
摘要 Disclosed is a semiconductor device facilitating a peripheral portion thereof with a breakdown voltage higher than the breakdown voltage in the drain drift layer without employing a guard ring or field plate. A preferred embodiment includes a drain drift region with a first alternating conductivity type layer formed of n drift current path regions and p partition regions arranged alternately with each other, and a breakdown withstanding region with a second alternating conductivity type layer formed of n regions and p regions arranged alternately with each other, the breakdown withstanding region providing no current path in the ON-state of the device and being depleted in the OFF-state of the device. Since depletion layers expand in both directions from multiple pn-junctions into n regions and p regions in the OFF-state of the device, the adjacent areas of p-type base regions, the outer area of the semiconductor chip and the deep area of the semiconductor chip are depleted. Thus, the breakdown voltage of breakdown withstanding region is higher than the breakdown voltage of drain drift region.
申请公布号 US2004124465(A1) 申请公布日期 2004.07.01
申请号 US20030735501 申请日期 2003.12.12
申请人 FUJI ELECTRIC CO., LTD. 发明人 ONISHI YASUHIKO;FUJIHIRA TATSUHIKO;UENO KATSUNORI;IWAMOTO SUSUMU;SATO TAKAHIRO;NAGAOKA TATSUJI
分类号 H01L29/06;H01L21/331;H01L21/336;H01L29/739;H01L29/78;H01L29/861;(IPC1-7):H01L29/76 主分类号 H01L29/06
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