CURE APPARATUS WITH MAGAZINE

摘要

PURPOSE: A cure apparatus with a magazine is provided to shorten an interval of process time by making a plurality of die attach apparatuses in-line with a hardening apparatus such that the plurality of die attach apparatuses are individually installed in a die attach process and a hardening process. CONSTITUTION: The inner space of a chamber(11) is isolated from the outside. An inlet/outlet for a chip mounting frame is formed in the chamber. A heater assembly(31) increases a temperature, installed inside the chamber. A fan circulates air, installed inside the chamber. A fan driving unit(51) drives the fan. A plurality of slots(23) into which the chip mounting frame is inserted are vertically disposed in the magazine(21). A magazine elevating unit(41) vertically transfers the position of the magazine.