| 摘要 |
An electro-forming master, a minute metal pattern repeatedly formed by the electro-forming master, and a method for manufacturing the minute metal pattern by the electro-forming process are disclosed. The electro-forming master is manufactured by overlapping two electrode bases having the same pattern each other or forming an electrode base made of two kinds of metal-layered plates, filling a space portion formed in the electrode base with an insulating hetero-material having elasticity and removing the upper electrode base or the upper metal layer to form a hetero-material of a pin portion and a root portion. The insulating hetero-material having elasticity includes silicon as a main component. Silicon has elasticity in addition to excellent insulating and hetero characteristics. |
