发明名称 SIGNAL PROCESSING METHOD FOR IN-SITU, SCANNED-BEAM PARTICLE MONITORING
摘要 A novel method for analyzing the pulse train resulting from a scanned beam particle monitor is described. The method enhances signal-to-noise ratio and significantly reduces particle false alarm rate. Performed in the time domain, the method filters noise pulses that do not occur at the scanner frequency. The analysis further identifies particle-pulse-envelopes (PPE's) by performing a forward-looking and backward-looking autocorrelation. Gaussian fits are subsequently applied to identified particle-pulse envelopes, to determine particle characteristics, such as size and speed.
申请公布号 WO03023368(A8) 申请公布日期 2004.07.01
申请号 WO2002US28698 申请日期 2002.09.09
申请人 INFICON, INC. 发明人 BONIN, MICHEL, P.;STIBBICH, AARON;HOLVE, DONALD, J.
分类号 G01N15/00;G01N15/02;G01N15/06;(IPC1-7):G01N15/02;G06T7/00 主分类号 G01N15/00
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