MICROFABRICATION TOOL PEDESTAL AND METHOD OF USE

摘要

The present invention relates to equipment for supporting microfabrication tools, and in particular, to microfabrication tool pedestals including adjustable supports. According to one embodiment of the present invention, a pedestal (10) for a microfabrication tool is provided. The pedestal includes a frame constructed and arranged to support the microfabrication tool and a plurality of supports (30) movable along and connected to the frame. According to another embodiment of the present invention, a method of providing a supporting for a microfabrication tool is provided. The method includes providing a pedestal comprising a frame constructed and arranged to support the microfabrication tool and a plurality of supports connected to the frame, and laterally repositioning the supports relative to the frame.