| 摘要 |
Provided is an inspection method for a multilayer gas sensing device, capable of certainly and easily detecting a defective product originating from faults such as gaps or cracks. For the inspection of the gas sensing device including a sensor cell in which a measured gas side electrode is coated with a porous diffusion resistance layer in a stacked condition and the diffusion resistance layer is further coated with a dense protective layer in a stacked condition, in a state where the gas sensing device is immersed in a conductive inspection solution and a reference electrode of the sensor cell is placed into a non-contact with the solution, a voltage is applied between the solution and the reference electrode to measure a current flowing therebetween. On the basis of the measured current value, a decision is made as to whether or not the insulation is kept between the solution and the reference electrode.
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